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Microstructure Characterization

We perform nano-micro scale characterization on various microstructures such as MEMS accelerometers, gyroscopes, micro thrusters, micro mirrors, microcapsules, cantilever beams, and metamaterials to measure the structure dependent stiffness along with failure analysis.

The FT-MTA03 Micromechanical Testing and Assembly System is a highly versatile testing instrument for the accurate quantification of mechanical properties and dimensions/geometry in the micro- and nanoscale. It enables force measurements within +/-200 mN with a resolution of 0.5 nN (covering 9 orders of magnitude) and displacements from 0.1 nm to 29 mm (covering 8 orders of magnitude) along three axes.

Applications:

  • Tensile testing of soft microfibers as small as 1 µm in diameter
  • MEMS failure analysis
  • Metamaterials structural stiffness
  • Particle crushing
  • Pillar compression
  • Microcapsules, micro-beam fracture characterization
  • Shear strength measurement in solder bonds
  • Lateral Force (Friction) measurements
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Main Features:

  • Adjustable sensing direction (vertical, horizontal, angles)
  • Tungsten tip at the end of tip to experiment on structures <1 µm
  • Tiltable microscope (180° rotation range around the sample)
  • 95 mm working distance of digital microscope with a large depth of field and 7 motorized optical zoom
  • 1 nm resolution in X-Y mapping


Contact us for our full list of capabilities and a free consultation session